| 孙健,刘书彬,李伟,姜肃猛,宫骏,孙超.电子束物理气相沉积制备热障涂层研究进展[J].装备环境工程,2019,16(1):1-6. SUN Jian,LIU Shu-bin,LI Wei,JIANG Su-meng,GONG Jun,SUN Chao.Research Progress of Thermal Barrier Coating Prepared by Electron Beam Physical Vapor Deposition[J].Equipment Environmental Engineering,2019,16(1):1-6. |
| 电子束物理气相沉积制备热障涂层研究进展 |
| Research Progress of Thermal Barrier Coating Prepared by Electron Beam Physical Vapor Deposition |
| 投稿时间：2018-08-10 修订日期：2019-01-25 |
| DOI：10.7643/ issn.1672-9242.2019.01.001 |
| 中文关键词: 航空发动机 电子束物理气相沉积 热障涂层 粘结层 工件转速 工件温度 |
| 英文关键词:aeroengine electron beam physical vapor deposition thermal barrier coating bond coating substrate rotation speed substrate temperature |
| 基金项目: |
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| Author | Institution |
| SUN Jian | 1. Research Department of Material Surface Engineering. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China; 2. School of Materials Science and Engineering, University of Science and Technology of China, Shenyang 110016, China |
| LIU Shu-bin | 1. Research Department of Material Surface Engineering. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China; 2. School of Materials Science and Engineering, University of Science and Technology of China, Shenyang 110016, China |
| LI Wei | 1. Research Department of Material Surface Engineering. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China; 2. School of Materials Science and Engineering, University of Science and Technology of China, Shenyang 110016, China |
| JIANG Su-meng | 1. Research Department of Material Surface Engineering. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China |
| GONG Jun | 1. Research Department of Material Surface Engineering. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China; 2. School of Materials Science and Engineering, University of Science and Technology of China, Shenyang 110016, China |
| SUN Chao | 1. Research Department of Material Surface Engineering. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China; 2. School of Materials Science and Engineering, University of Science and Technology of China, Shenyang 110016, China |
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| 中文摘要: |
| 介绍了电子束物理气相沉积设备的主要组成、工作原理和电子束物理气相沉积热障涂层的结构特点，并重点论述了工件转速、工件温度、靶材蒸汽入射角度、工件表面的粗糙度、粘结层预氧化、改性粘结层和双层陶瓷层等对电子束物理气相沉积热障涂层性能的影响。 |
| 英文摘要: |
| The main components, working principle of electron beam physical vapor deposition equipment and the micro-structures of thermal barrier coatings prepared by electron beam physical vapor deposition were briefly introduced. The effect of substrate rotation speed, substrate temperature, vapor incident angle, substrate roughness, bond coating pre-oxidation, modified bond coating and double- ceramic layer on the performance of thermal barrier coatings of electron beam physical vapor deposition was discussed. |
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