| 侯翔,王铁钢,刘源,张姣姣,朱强.电弧离子镀TiN涂层沉积工艺研究[J].装备环境工程,2019,16(5):72-77. HOU Xiang,WANG Tie-gang,LIU Yuan,ZHANG Jiao-jiao,ZHU Qiang.Deposition Technology of TiN Coatings Prepared by Arc Ion Plating[J].Equipment Environmental Engineering,2019,16(5):72-77. |
| 电弧离子镀TiN涂层沉积工艺研究 |
| Deposition Technology of TiN Coatings Prepared by Arc Ion Plating |
| 投稿时间：2018-12-24 修订日期：2019-05-25 |
| DOI：10.7643/ issn.1672-9242.2019.05.014 |
| 中文关键词: 电弧离子镀技术 TiN涂层 硬度 残余应力 摩擦磨损 |
| 英文关键词:arc ion plating technology TiN coating hardness residual stress friction and wear |
| 基金项目:天津职业技术师范大学校级科研项目（KJ1812）；天津职业技术师范大学“创想梦工场”众创空间创新创业项目（10123001）；天津市高等学校创新团队培养计划项目（TD13–5096） |
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| Author | Institution |
| HOU Xiang | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
| WANG Tie-gang | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
| LIU Yuan | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
| ZHANG Jiao-jiao | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
| ZHU Qiang | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
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| 中文摘要: |
| 目的 优化电弧离子镀沉积TiN涂层的制备工艺，分析不同N2/Ar条件对涂层微观结构和力学性能的影响机制，进一步强化和研究TiN涂层的优异性能。方法 采用带有附加线圈磁场的电弧离子镀技术在不同N2/Ar条件下制备TiN涂层，利用扫描电子显微镜、X射线衍射仪、超景深显微镜、维氏硬度计、薄膜应力仪和高温摩擦机观察涂层微观结构、测试力学性能。结果 随着N2/Ar流量比的增加，涂层表面形貌得到改善，大颗粒的数量和尺寸明显减少，表面变得光滑致密。TiN涂层的生长取向由沿(110)晶面择优生长，逐渐转变为沿(111)晶面择优生长。涂层显微硬度呈上升趋势，硬度最高为2260HV；当N2/Ar流量比为2:1时，摩擦系数最低为0.71，磨损率最低为1.5×10-2 μm3/(N•μm)，磨痕边界清晰，大颗粒和磨屑较少。结论 当N2/Ar流量比为2:1时，TiN涂层结构致密，且具有最佳的各项力学性能。 |
| 英文摘要: |
| Objective To optimize the preparation process of TiN coating deposited by arc ion plating, analyze the influence mechanism of different N2/Ar on microstructure and mechanical properties of the coating, and further strengthen and study the excellent performance of TiN coating. Methods The TiN coating was prepared by arc ion plating under different N2/Ar conditions. The microstructure and mechanical behavior of the coating was tested by scanning electron microscope, X-ray diffractometer, ultra depth of field microscope, vickers hardness tester, coating stress meter and high temperature friction machine. Results With the increase of N2/Ar, the surface morphology of the coating was improved, the number and size of large particles on the surface of the coating were significantly reduced, and the surface became smooth and compact. The growth orientation of TiN coating was preferentially grown along the (110) crystal plane and gradually changed to preferential growth along the (111) crystal plane, and the microhardness of the coating is increased, the highest hardness was 2,260 HV. When the N2/Ar was 2:1, the friction coefficient was at least 0.707, and the wear rate was at least 1.5×10-2 μm3•N-1•μm-1, the wear marks were clear and the defects such as large particles and wear debris were less. Conclusion When N2/Ar is 2:1, TiN coating has good microstructure and the best mechanical properties. |
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