| 葛敏,刘艳梅,李壮,王重阳,张蕊,王铁钢.N2流量比对AlCrMoSiN涂层组织结构和性能的影响[J].装备环境工程,2023,20(3):108-116. GE Min,LIU Yan-mei,LI Zhuang,WANG Chong-yang,ZHANG Rui,WANG Tie-gang.Effects of N2 Flow Ratio on Microstructure and Properties of AlCrMoSiN Coatings[J].Equipment Environmental Engineering,2023,20(3):108-116. |
| N2流量比对AlCrMoSiN涂层组织结构和性能的影响 |
| Effects of N2 Flow Ratio on Microstructure and Properties of AlCrMoSiN Coatings |
| |
| DOI：10.7643/issn.1672-9242.2023.03.014 |
| 中文关键词: 复合磁控溅射 AlCrMoSiN涂层 N2流量比 自润滑 微观结构 力学性能 摩擦磨损性能中图分类号:TG174.4 文献标识码:A 文章编号:1672-9242(2023)03-0108-09 |
| 英文关键词:hybrid magnetron sputtering AlCrMoSiN coating N2 flow ratio self-lubricating microstructure mechanical property tribological wear property |
| 基金项目:天津市教委科研计划(2021ZD005, 2022ZD020, 2022ZD033) |
|
|
| Author | Institution |
| GE Min | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
| LIU Yan-mei | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
| LI Zhuang | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
| WANG Chong-yang | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
| ZHANG Rui | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
| WANG Tie-gang | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
|
| 摘要点击次数: |
| 全文下载次数: |
| 中文摘要: |
| 目的 减少硬质合金刀具在干式切削时产生的切削热，降低切削温度，从而提高刀具使用寿命。向AlCrSiN涂层中掺杂Mo元素，在涂层服役过程中易生成层状MoO3润滑膜，降低刀面与切屑和工件间的摩擦，实现涂层刀具的自润滑功能。方法 利用高功率脉冲磁控溅射和脉冲直流磁控溅射复合技术制备AlCrMoSiN涂层，改变反应气体N2流量，调节涂层的成分和结构。采用X射线衍射仪、扫描电子显微镜分析AlCrMoSiN涂层的物相成分和微观结构，利用纳米压痕仪、划痕仪和摩擦试验机分别测试涂层的力学性能和摩擦学行为。结果 当N2流量比增大，AlCrMoSiN涂层沿(111)晶面择优生长，衍射峰变得尖锐，(111)和(200)晶面衍射峰向小角度偏移。当N2流量比为16%时，涂层的硬度和弹性模量最大，分别为17.56 GPa和292.31 GPa。当N2流量比为18%时，涂层的临界载荷最高，约为70.6 N，摩擦系数最低达0.54，磨损率为1.3×10–3 µm3/(N×µm)，此时涂层最耐磨。结论 N2流量比对涂层组织结构有重要影响，随着N2流量比增大，涂层的力学性能与摩擦磨损性能逐渐改善。 |
| 英文摘要: |
| The work aims to reduce the cutting heat generated by carbide tools during dry cutting, reduce the cutting temperature, and thus improve the tool life. Mo elements were doped into the AlCrSiN coating, and the laminar MoO3 lubricating film was easily generated during the service of the coating, which reduced the friction between the tool surface and chips and the workpiece, and realized the self-lubricating function of the coated tool. The AlCrMoSiN coating was prepared by high power pulsed magnetron sputtering and pulsed DC magnetron sputtering composite technology, and the composition and structure of the coating were adjusted by changing the flow rate of the reaction gas N2. The physical phase composition and microstructure of the AlCrMoSiN coating were analyzed with X-ray diffractometer and scanning electron microscope. The mechanical properties and tribological behavior of the coatings were tested through a nanoindenter, a scratch tester and a friction tester, respectively. With the increase of N2 flow ratio, the AlCrMoSiN coating grew selectively along the (111) crystal plane, the diffraction peaks became sharp, and the diffraction peaks on the (111) and (200) crystal planes were shifted to a small angle. When the N2 flow ratio was 16%, the hardness and elastic modulus of the coating were the highest, which were 17.56 GPa and 292.31 GPa, respectively. When the N2 flow ratio was 18%, the coating was the most wear-resistant at critical load of about 70.6 N, the lowest friction coefficient of 0.54 and the wear rate of 1.3×10–3 µm3/(N×µm). The N2 flow ratio has an important effect on the coating organization, and the mechanical properties and tribological wear properties of the coating gradually improve as the N2 flow rate ratio increases. |
| 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |
|
|
|
