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| Effects of N2 Flow Ratio on Microstructure and Properties of AlCrMoSiN Coatings |
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| DOI：10.7643/issn.1672-9242.2023.03.014 |
| KeyWord:hybrid magnetron sputtering AlCrMoSiN coating N2 flow ratio self-lubricating microstructure mechanical property tribological wear property |
| Author | Institution |
| GE Min |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
| LIU Yan-mei |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
| LI Zhuang |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
| WANG Chong-yang |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
| ZHANG Rui |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
| WANG Tie-gang |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
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| Abstract: |
| The work aims to reduce the cutting heat generated by carbide tools during dry cutting, reduce the cutting temperature, and thus improve the tool life. Mo elements were doped into the AlCrSiN coating, and the laminar MoO3 lubricating film was easily generated during the service of the coating, which reduced the friction between the tool surface and chips and the workpiece, and realized the self-lubricating function of the coated tool. The AlCrMoSiN coating was prepared by high power pulsed magnetron sputtering and pulsed DC magnetron sputtering composite technology, and the composition and structure of the coating were adjusted by changing the flow rate of the reaction gas N2. The physical phase composition and microstructure of the AlCrMoSiN coating were analyzed with X-ray diffractometer and scanning electron microscope. The mechanical properties and tribological behavior of the coatings were tested through a nanoindenter, a scratch tester and a friction tester, respectively. With the increase of N2 flow ratio, the AlCrMoSiN coating grew selectively along the (111) crystal plane, the diffraction peaks became sharp, and the diffraction peaks on the (111) and (200) crystal planes were shifted to a small angle. When the N2 flow ratio was 16%, the hardness and elastic modulus of the coating were the highest, which were 17.56 GPa and 292.31 GPa, respectively. When the N2 flow ratio was 18%, the coating was the most wear-resistant at critical load of about 70.6 N, the lowest friction coefficient of 0.54 and the wear rate of 1.3×10–3 µm3/(N×µm). The N2 flow ratio has an important effect on the coating organization, and the mechanical properties and tribological wear properties of the coating gradually improve as the N2 flow rate ratio increases. |
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