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| Atmospheric Failure Mechanism of Thermal Knife Used in Satellite Deployment Components |
| Received:April 25, 2024 Revised:May 27, 2024 |
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| DOI：10.7643/issn.1672-9242.2024.08.011 |
| KeyWord:patterned film thermal knife magnetron sputtering failure mechanism platinum-based film thermal stability |
| Author | Institution |
| CHEN Wei |
School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou , China;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| LI Qinglin |
School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou , China |
| WANG Peng |
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| QIANG Zhiqing |
Institute of Aerospace System Engineering Shanghai, Shanghai , China;Space Structure and Mechanism Technology Laboratory of China Aerospace Science and Technology Group Co., Ltd., Shanghai , China |
| CUI Qifeng |
Institute of Aerospace System Engineering Shanghai, Shanghai , China;Space Structure and Mechanism Technology Laboratory of China Aerospace Science and Technology Group Co., Ltd., Shanghai , China |
| QIAO Li |
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
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| Abstract: |
| The work aims to analyze the reasons for the decrease in service life of patterned resistive Pt thin films in atmospheric environments. Based on this, existing models of patterned resistance films of thermal knives were selected to prepare Pt/Ti films with different thickness. The changes of surface morphology, composition and crystal structure of the films with temperature in the atmospheric environment and their effects on resistivity and mechanical properties were investigated. It was found that at high atmospheric temperature, the Ti transition layer diffused from the bottom to the surface to form alloys with Pt, and part of Ti diffused to the surface to be oxidized, resulting in the trend of first increase and then decrease of the film resistance. At the same time, the Ti transition layer acting as the "adhesive" between the Pt film and the substrate, was exhausted by diffusion, resulting in a decrease in the binding force between the Pt film and the silicon nitride substrate.The above factors ultimately lead to the reduction in the cutting life of the thermal knife with patterned films as the core when used at high temperature in the atmospheric environment. |
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