|
| Design of Sensitive Element for Differential Pressure Wind Micro Sensor |
| Received:January 30, 2019 Revised:June 25, 2019 |
| View Full Text View/Add Comment Download reader |
| DOI：10.7643/ issn.1672-9242.2019.06.001 |
| KeyWord:MEMS technology wind micro sensor sensitive element simulation and analysis |
| Author | Institution |
| WEI Ke-jing |
1. College of Meteorology and Oceanography, National University of Defense Technology, Nanjing , China |
| SUN Xue-jin |
1. College of Meteorology and Oceanography, National University of Defense Technology, Nanjing , China |
| DU Li-dong |
2. Institute of Electronics, Chinese Academy of Sciences, Beijing , China |
|
| Hits: |
| Download times: |
| Abstract: |
| Objective To improve the measurement accuracy of wind micro sensor. Methods Firstly, the finite element sim-ulation software was used to simulate the material of the sensitive element for the differential pressure micro sensor to determine the structural parameters. Secondly, the wind pressure distribution around the structure of the wind measurement element was simulated to establish an optimal wind pressure distribution equation; and the wind speed and direction calculation algorithm was designed based on the wind pressure distribution equation. Results Through simulation and analysis of the wind pressure distribution, the structural design of multiple air holes and the method of taking the pressure film with silicon island as the pressure sensitive film were proposed. Conclusion The method improves measurement accuracy of the wind micro sensor. |
| Close |
|
|
|