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| Electrostatic Discharge Response Analysis and Protection of NiCr Thin Film Energy Conversion Components |
| Received:May 07, 2024 Revised:July 05, 2024 |
| View Full Text View/Add Comment Download reader |
| DOI：10.7643/issn.1672-9242.2024.11.002 |
| KeyWord:NiCr thin film energy conversion component electrostatic discharge electrostatic protection electrostatic response COMSOL TVS |
| Author | Institution |
| LI Bo |
State Key Laboratory of Electromechanical Integrated Manufacturing of High-performance Electronic Equipment, Xidian University, Xi'an , China |
| ZHANG Yun |
State Key Laboratory of Electromechanical Integrated Manufacturing of High-performance Electronic Equipment, Xidian University, Xi'an , China |
| WU Bingkai |
State Key Laboratory of Electromechanical Integrated Manufacturing of High-performance Electronic Equipment, Xidian University, Xi'an , China |
| XIE Ruizhen |
State Key Laboratory of Transient Chemical Effects and Control, Shaanxi Applied Physics-chemistry Research Institute, Xi'an , China |
| YAO Hongzhi |
State Key Laboratory of Transient Chemical Effects and Control, Shaanxi Applied Physics-chemistry Research Institute, Xi'an , China |
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| Abstract: |
| Aiming at the problem that NiCr thin film transducer assembly is susceptible to human body electrostatic interference, the work aims to propose a method for analyzing its electrostatic discharge response characteristics, and design an electrostatic protection scheme based on transient voltage suppression (TVS) diode to improve its anti-static interference ability. Based on theoretical analysis and COMSOL multi-physics simulation software, an electrostatic discharge model of NiCr thin film transducer assembly was constructed, and its response characteristics in human body electrostatic environment were studied, and the TVS diode was designed as a protective measure. By studying the electrostatic response characteristics of NiCr thin film energy conversion components, the temperature and temperature distribution of the bridge area were obtained. The results showed that the electrostatic protection design using TVS diodes could significantly reduce electrostatic interference and showed excellent protection effect. In the human body electrostatic discharge environment, the bridge length of the NiCr film transducer assembly has no significant effect on the temperature, but the bridge area temperature decreases with the increase of width and thickness. The peak current error of simulation and experimental results is within 2.5%, and the peak current is reduced by 40%, which verifies the effectiveness of TVS diodes in electrostatic protection and helps to improve the reliability and safety of NiCr thin film energy conversion components. |
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