|
| Ignition Performance of TaNZr Film Energy Exchanger |
| Received:June 25, 2024 Revised:September 05, 2024 |
| View Full Text View/Add Comment Download reader |
| DOI：10.7643/issn.1672-9242.2024.11.005 |
| KeyWord:TaNZr MEMS SEM TCR performance characterization ignition performance |
| Author | Institution |
| REN Xiaoming |
State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an , China |
| LI Jiao |
State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an , China |
| XUE Yuanyuan |
State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an , China |
| ZHAO Tuan |
State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an , China |
| FU Pei |
State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an , China |
| LIU Wei |
State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an , China |
|
| Hits: |
| Download times: |
| Abstract: |
| The work aims to investigate the effect of Zr on the ignition performance of TaN film energy exchanger. Four kinds of energy exchangers for TaNZr films were prepared by MEMS technology. The performance of the TaNZr films was characterized by SEM, energy spectrum analysis and four-probe measurements. Under the condition of capacitive ignition, the ignition performance of the energy exchangerwas obtained. The surface of TaNZr films was flat. The TCR of the TaNZr films was negative. Both the square resistance and TCR increased continuously with the increase of Zr. The average ignition voltage of TaN0.6Zr0.3 film was the lowest, 4.58V. The action time of TaN0.2Zr0.1 was the longest.The TaNZr film energy exchanger has the characteristics of high speed generation and low ignition voltage and provides a new idea for the design of energy exchanger. |
| Close |
|
|
|