Magnetron Sputtering Deposition and Performance Optimization of Ta/Cr Coatings
Received:November 21, 2024  Revised:January 07, 2025
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DOI:10.7643/issn.1672-9242.2025.01.005
KeyWord:α-Tacoating  Cr buffer layer  magnetron sputtering  mechanical properties  interface bonding  friction and wear
                 
AuthorInstitution
XU Rui Branch of Chemistry and Chemical EngineeringGuangdong Laboratory, Guangdong Chaozhou , China
LIU Long State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan , China
LIU Cuicui State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan , China
XU Zhigang Branch of Chemistry and Chemical EngineeringGuangdong Laboratory, Guangdong Chaozhou , China;State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan , China
PENG Jian Branch of Chemistry and Chemical EngineeringGuangdong Laboratory, Guangdong Chaozhou , China;State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan , China
WANG Chuanbin Branch of Chemistry and Chemical EngineeringGuangdong Laboratory, Guangdong Chaozhou , China;State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan , China
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Abstract:
      The work aims to introduce a Cr buffer layer between the Ta coating and the substrate and study the influence of different Cr buffer layer thickness (ranging from 447 nm to 1503 nm) on the phase structure, microscopic morphology, mechanical properties, bonding properties and friction and wear properties of the coating, so as to enhance the bonding strength between the Ta coating and the stainless steel substrate and improve the performance of the Ta/Cr composite coating. A Cr buffer layer was introduced on the PCrNi1MoA alloy steel substrate according to the magnetron sputtering technology to construct a Ta/Cr composite coating. An X-ray diffractometer was adopted to analyze the phase structure of the Ta coating. A scanning electron microscope was used to observe the morphological characteristics of the surface and crosssection of the Ta/Cr composite coating, and measure its thickness and observe the cross-sectional density. The mechanical properties of Ta/Cr composite coating were tested by nanoindentation instrument, the bonding between coating and substrate was tested by Rockwell hardness tester and scratch meter, and the wear resistance of the material was tested by friction and wear meter.When the thickness of buffer layer was between 447 and 1 283 nm, a single phase α-Ta coating could be obtained.When the buffer layer thickness was 1 283 nm, the Ta coating had excellent mechanical properties, with a hardness reaching 11.42 GPa, an elastic modulus of 179 GPa, and an interface bonding force exceeding 30 N. It also exhibited excellent friction and wear characteristics, with a friction coefficient of only 0.3-0.4 and a wear rate as low as 0.011×10‒6 mm³/N.m. The change in the thickness of the Cr buffer layer significantly affects the phase structure, grain size and surface morphology of the Ta/Cr composite coating, thereby influencing the bonding strength between the substrate and the Ta coating as well as the mechanical properties of the coating. The introduction of a Cr buffer layer with a certain thickness is beneficial to the preparation of α-Ta coating with excellent mechanical and friction and wear properties and good bonding performance with the substrate.
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