| 任小明,李蛟,薛园园,赵团,付佩,刘卫.TaNZr薄膜换能元发火性能研究[J].装备环境工程,2024,21(11):33-37. REN Xiaoming,LI Jiao,XUE Yuanyuan,ZHAO Tuan,FU Pei,LIU Wei.Ignition Performance of TaNZr Film Energy Exchanger[J].Equipment Environmental Engineering,2024,21(11):33-37. |
| TaNZr薄膜换能元发火性能研究 |
| Ignition Performance of TaNZr Film Energy Exchanger |
| 投稿时间：2024-06-25 修订日期：2024-09-05 |
| DOI：10.7643/issn.1672-9242.2024.11.005 |
| 中文关键词: TaNZr MEMS SEM 电阻温度系数 性能表征 发火性能中图分类号:TJ450 文献标志码:A 文章编号:1672-9242(2024)11-0033-05 |
| 英文关键词:TaNZr MEMS SEM TCR performance characterization ignition performance |
| 基金项目: |
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| Author | Institution |
| REN Xiaoming | State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an 710061, China |
| LI Jiao | State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an 710061, China |
| XUE Yuanyuan | State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an 710061, China |
| ZHAO Tuan | State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an 710061, China |
| FU Pei | State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an 710061, China |
| LIU Wei | State Key Laboratory of Transient Chemical Effects and Control,Shaanxi Applied Physics and Chemistry Research Institute, Xi'an 710061, China |
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| 中文摘要: |
| 目的 探索Zr对TaN薄膜换能元发火性能的影响。方法 利用MEMS技术制备4种TaNZr薄膜换能元。利用SEM、能谱分析和四探针对TaNZr薄膜进行性能表征。在电容发火的条件下，获得换能元的发火性能。结果 TaNZr薄膜表面平整。TaNZr薄膜的电阻温度系数为负值。随着Zr膜比例的增大，方块电阻和TCR均不断增大。TaN0.6Zr0.3薄膜换能元的平均发火电压最小，为4.58 V。TaN0.2Zr0.1的作用时间最长。结论 TaNZr薄膜换能元具有高瞬发性、发火电压低等特点，为换能元的设计提供了一种新思路。 |
| 英文摘要: |
| The work aims to investigate the effect of Zr on the ignition performance of TaN film energy exchanger. Four kinds of energy exchangers for TaNZr films were prepared by MEMS technology. The performance of the TaNZr films was characterized by SEM, energy spectrum analysis and four-probe measurements. Under the condition of capacitive ignition, the ignition performance of the energy exchangerwas obtained. The surface of TaNZr films was flat. The TCR of the TaNZr films was negative. Both the square resistance and TCR increased continuously with the increase of Zr. The average ignition voltage of TaN0.6Zr0.3 film was the lowest, 4.58V. The action time of TaN0.2Zr0.1 was the longest.The TaNZr film energy exchanger has the characteristics of high speed generation and low ignition voltage and provides a new idea for the design of energy exchanger. |
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